Ga2O3 Materials: Current Status and Future Prospects
Fifteen years have passed since I started researching gallium oxide power devices. In the early stages of our research, we prototyped MESFETs or SBDs using extremely small epitaxial wafers of about 4 mm square or less that were fabricated using the floating zone method and the MBE method. We have now reached the stage of mass production of 4-inch wafers by using the EFG and HVPE methods. In the future, larger diameter and lower cost will be required. In this talk, I would like to look back on the past and discuss the current situation and future prospects.